839-101612-887 ESC Electrostatic sucker

Description

839-101612-887 ESC Electrostatic sucker

ESC Electrostatic Chuck (E-Chuck), also known as electrostatic chuck, is a fixture that uses the

principle of electrostatic adsorption to hold and fix the adsorbed object. In the semiconductor manufacturing

process, it is mainly used to adsorb ultra-clean sheets (such as silicon wafers), and keep the adsorption

relatively flat, can inhibit the deformation of the adsorption in the process, and can adjust the temperature of the adsorption.
In general, electrostatic suction cups have some common characteristics and advantages, such as:

Uniform adsorption: Electrostatic adsorption can be evenly distributed on the wafer surface to ensure that the wafer will not warp.
Stable adsorption force: The adsorption force of the electrostatic sucker is continuously stable, which can ensure the processing accuracy of the wafer.
Controllable temperature: The static suction cup can adjust the temperature of the adsorption to adapt to different process requirements.
Small pollution, no damage to the wafer: electrostatic suction cup has little pollution to the wafer, no damage to the wafer, can be used in high vacuum environment.

839-101612-887

Electrostatic suction cups (such as 839-101612-887 ESC electrostatic suction cups) are generally

suitable for wafers of various sizes and types, especially in semiconductor manufacturing and precision

machining. However, the exact type of wafer applicable may vary depending on the design, size, and functionality of the sucker.

Electrostatic suction cups are mainly used to adsorb and hold wafers to ensure that the wafers can

remain stable and flat during manufacturing and processing. They typically have strong

adsorption and stability and can be adapted to wafers of different sizes and materials.

In semiconductor manufacturing, electrostatic suction cups are often used to fix and carry silicon

wafers, wafers, etc. For wafers of different sizes, such as 300 mm (about 12 inches) wafers, electrostatic

suction cups of corresponding sizes are also available. In addition, electrostatic suction cups are

also widely used in PVD, PECVD, ETCH, EUVL, ion implantation and other high-end semiconductor manufacturing equipment.

Please contact Sunny sales@xiongbagk.cn for the best price.

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