EDGE6513A  elite™ Series RF Plasma Generator

The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available. On board interfaces include RS232 and 25pin analog. Profibus or DeviceNet are available as customized options.
The elite series of products may be used as source or bias generators for continuous operation or as stand-alone batch tools. Elite is ideally suited for Solar, LED, MEMs and semiconductor applications.

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Description

EDGE6513A  elite™ Series RF Plasma Generator

Product description

The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available. On board interfaces include RS232 and 25pin analog. Profibus or DeviceNet are available as customized options.
The elite series of products may be used as source or bias generators for continuous operation or as stand-alone batch tools. Elite is ideally suited for Solar, LED, MEMs and semiconductor applications.

EDGE6513A  

Product parameter

Low Cost of Ownership
• Air-cooled for lower facilities cost
• High efficiency design, DC to RF efficiency of >85% for low power consumption
• Wide input range allows for world wide installation without the need for special transformers
Ease of Installation
• Air cooling does not require connection to factory cooling loop
• Compact half rack enclosure enables direct tool mounting
• Standard IEC input connector eliminates the need for special wiring harnessing
• Single phase, wide AC input range allows ease of installation in world wide markets with varying AC line voltages
• Fused for operation on single or two phase systems
Exceptional Reliability
• Integrated single board design eliminates cables and connectors
• Patented inductive-clamp technology protects the generator from the most adverse VSWR load conditions and plasma fluctuations
Increased Value
• Field-Programmable Gate Array (FPGA) based control leads to fast control loop and generator protection from load transients
• Common Exciter (CEX) allows master slave operation and synchronization with other generators
• Optional LCD display and 6-button multifunction key pad allows local operation from the front panel

Application field

• Programmable pulse mode 1Hz to 25KHz
• Power regulation through DC bias control
• Profibus® or DeviceNet™ interface
• Two line 16bit LCD display with 6-button multifunction keypad

Please contact Sunny sales@xiongbagk.cn for the best price.

➱ sales manager: Sunny
➱ email mailto: sales@xiongbagk.cn
➱ Skype/WeChat: 18059884797
➱ phone/Whatsapp: + 86 18059884797
➱ QQ: 3095989363
➱ Website:www.sauldcs.com

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