MKS Instruments, the world’s leading provider of gas and control solutions, recently announced the addition of a high-performance product, the AX8407, to its SEMOZON® family of ozone generators. With its high concentration, high flow rate and ultra-clean ozone production capacity, this new ozone generator provides an environmentally friendly alternative for the semiconductor, pharmaceutical and water treatment industries.

The AX8407 ozone generator converts pure oxygen to ozone through silent electrical discharge technology, capable of producing up to 335 g/m3 of ozone over a flow range of 5 to 40 standard litres/min. This level of output is much higher than that of other similar products on the market, and at the same time, because only extremely small amounts of doped nitrogen are required in its design, the content of pollutants such as nitrogen oxide compounds is extremely low.

AX8400

The AX8407 design also includes innovative features such as patented battery technology, modular ozone generation units, flexible control interfaces, and compact size design, making it easy to integrate into a variety of industrial applications. In addition, the equipment is CE, UL/CSA and SEMI F47 safety certification, ensuring compliance and reliability worldwide.

MKS Instruments’ AX8407 ozone generator is expected to play an important role in improving production efficiency, reducing operating costs and driving environmentally friendly production. Its launch further solidifies MKS Instruments’ global leadership in ozone technology and solutions.

About MKS Instruments:
MKS Instruments is a leading global provider of gas and control solutions serving a broad range of high-tech industries, including semiconductor, industrial, life sciences and research markets. The company’s products and technologies are used in a wide variety of applications, including manufacturing, analytics, process control, and research.