MKS Instruments, the world’s leading provider of gas and control solutions, recently announced the addition of a high-performance product, the AX8407, to its SEMOZON® family of ozone generators. With its high concentration, high flow rate and ultra-clean ozone production capacity, this new ozone generator provides an environmentally friendly alternative for the semiconductor, pharmaceutical and water treatment industries
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【 Product features 】
The AX8407 ozone generator converts pure oxygen to ozone through silent electrical discharge technology, capable of producing up to 335 g/m3 of ozone over a flow range of 5 to 40 standard litres/min. This level of output is much higher than that of other similar products on the market, and at the same time, because only extremely small amounts of doped nitrogen are required in its design, the content of pollutants such as nitrogen oxide compounds is extremely low
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AX8400

【 Technical Specification 】

Ozone output: up to 335 g/Nm³
Traffic range: 5-40 slm
Battery pressure: 15-45 psig (100-310 kPa)
Control interface: Front panel control and remote operation
Cooling water temperature: 5-25 °C (41-77 °F)
Power requirements: 208 VAC (±10%), 3 Ø& Ground, no Neutral
Dimensions: 483 x 445 x 267 mm (19.0 x 17.5 x 10.5 in)
【 Application field 】

Semiconductor industry: Used for TEOS/ ozone CVD, Ta2O5 CVD, photoresist strips, wafer cleaning, contaminant removal, surface conditioning, oxide growth and ALD.
Pharmaceutical industry: Used for cleaning, sterilization and disinfection.
Water treatment: Suitable for cleaning, sterilization and disinfection, as well as clean in place (CIP).
【 Market response 】
MKS Instruments’ AX8407 ozone generator is expected to play an important role in improving production efficiency, reducing operating costs and driving environmentally friendly production. Its launch further solidifies MKS Instruments’ global leadership in ozone technology and solutions
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【 Future Outlook 】
With the global emphasis on environmental protection and sustainable development, the demand for high-concentration ozone generators is growing. The launch of AX8407 not only demonstrates MKS Instruments’ innovative capabilities in ozone technology, but also provides new impetus for industrial environmental processes.

【 Conclusion 】
The introduction of the MKS Instruments AX8407 ozone generator provides industry with an efficient and environmentally friendly ozone generation solution. Its high performance and reliability will help industrial production achieve greener and smarter development.