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Description
AX8407A 0190-17159 high flow ozone generator
Product Description
The AX8407A 0190-17159 is a high concentration, high flow ozone generator manufactured by MKS Instruments. Here are the details of the product:
Product Overview:
The AX8407 generator converts pure oxygen to ozone by silent electrical discharge, achieving high output and high concentration levels. It requires only a very small amount of doped nitrogen, far less than the level required for competitive ozone generators. As a result, the presence of pollutants, such as NOx compounds, is extremely low.
Main features:
High ozone concentrations and flows: Ozone concentrations up to 335 g/Nm³ or 21.7 wt% (at 5°C) and oxygen flows in a range of 5-40 slm provide process flexibility.
Clean, safe alternative chemical treatment: Ozone has a high REDOX potential, can be generated on site, and is easily converted to oxygen, is a green chemical that is easily converted to oxygen.
Low cost ownership: no consumables, no chemical processing costs.
Reliability and Compliance design: Over 100,000 hours of reliability testing, compliant with CE, UL/CSA and SEMI F47 standards.
AX8400
Product parameter
Ozone output: Maximum ozone output is 335 g/Nm³ (at 5°C cooling water), 305 g/Nm³ (at 17°C cooling water).
Oxygen flow range: 5-40 slm.
Operating range: Ambient temperature 10-40 °C (50-104 °F), nominal battery pressure (delivery) 15-45 psig (100-310 kPa).
Control interface: Front panel control and remote operation.
Intake gas: Oxygen: Grade 6 or better O2, nitrogen: 100-1000 ppm Grade 5 or better N2.
Cooling water temperature: 5-25 °C (41-77 °F).
Cooling water filtration: 100 microns.
Cooling water quality: resistivity ≥ 50 KΩ/cm.
Minimum water flow: 7.6 lpm (2.0 gpm).
Supply voltage: 208 VAC (±10%).
Phase: 3Ø & GND, no neutral.
Current requirement: 15 amps.
Frequency: 50/60 Hz.
Weight: 59 kg (130 lb).
Dimensions: 483 x 445 x 267 mm (19.0 x 17.5 x 10.5 inches) (width x depth x height)
Application field
Typical semiconductor ozone applications include TEOS/ ozone CVD, Ta2O5 CVD, photoresist stripping, wafer cleaning, contaminant removal, surface conditioning, oxide growth, and ALD. Ozone is also well suited for pharmaceutical and water treatment applications, including cleaning, disinfection and disinfection, as well as cleaning in situ (CIP).
Product advantages:
High purity ozone: The AX8407 is the purest ozone generator on the market, converting pure oxygen into ozone by silent electrical discharge for the highest output concentration levels.
Patented cell structure design: Capable of producing high concentrations of ozone, closed-loop operation provides tighter process control
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Please contact Sunny sales@xiongbagk.cn for the best price.
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➱ email mailto: sales@xiongbagk.cn
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➱ phone/Whatsapp: + 86 18059884797
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