E28B-23747  ETCH SENSOR

The MKS Type E28D is the RoHS-compliant solution for etch process-induced drift. Based
on the industry-standard Baratron capacitance manometer, MKS has developed structures
in the sensor that nearly eliminate the deposition of process byproducts on the diaphragm,
which minimizes drift. The Type E28D Baratron is temperature controlled to 100°C, accurate
to 0.25% of Reading and includes updated temperature control electronics to provide
superior long-term stability and repeatability. Optional heater and temperature status
LED/switches indicate that the heater (which maintains the sensor temperature to 100°C) is
in control. This capacitance manometer is available in Full Scale ranges down to 50 mTorr
(0.07 mbar) to accommodate today’s lower process pressures.
Based on established Baratron capacitance manometer technology, the sensor’s wetted
surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary
stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier Type 128, 628B, and E28B Baratron capacitance manometers and
can be used with MKS power supplies, display units and pressure controllers, or the user’s
compatible power supply/readout devices.

E28B-23747

Full Scale Ranges 0.05, 0.1, 0.25, 1, 2, 10, 20, and 100 Torr Resolution 0.001% of F.S. (0.002% of F.S. for 0.05 Torr)

Accuracy 0.25% of Reading (including non-linearity, hysteresis, and non-repeatability), 0.5% for <1 Torr and 0.05 Torr

Temperature Coeffi cients Zero 0.002% of F.S./°C for 1-100 Torr ranges; 0.01% F.S./°C for 0.1 Torr and 0.02% F.S./°C for 0.05

Torr Span 0.02% of Rdg./°C Ambient Operating Temperature 15°C to 50°C Volume 6.3 cc Warm-Up Time 2 hours for 1 Torr

and higher, 4 hours for < 1 Torr Overpressure Limit 45 psia (310 kPa) or 120% F.S., whichever is greater Materials Exposed

to Gases Inconel® Input Power Required ±15 VDC ±5% @ 0.6 Amps (max.) Output Signal Pressure: 0 to +10 VDC into >10K

Ω load Optional Features LED’s and Switches Temperature status: one semiconductor switch will turn “ON” and corresponding

green LED will be “ON” when the instrument is at temperature. Heater status: second semiconductor switch will turn “OFF” when

heater failure occurs and corresponding bi-color LED will be blinking red, otherwise light will remain green. Electromagnetic

Compatibility CE compliant to ECD Directive 2004/108/EEC Restriction of Hazardous Substances Fully compliant to RoHS

Directive 2002-95-EC Fittings Standard: 1/2” (12.7 mm) OD tube. Optional: 8 VCR® female, NW16-KF, mini-CF